Sr. Process Engineer, Chemical Mechanical Planarization, Terafab

We are building Terafab, a vertically integrated semiconductor factory at an unprecedented scale. The facility houses logic, memory, packaging, test, and lithography mask production under one roof, optimized for rapid iteration and maximum compute density per square foot.

Process engineering is where Terafab technology gets built, atom by atom, and chemical mechanical planarization (CMP) creates the flat surfaces that enable layer stacking. You will develop and own CMP processes across three distinct chip families: edge-inference processors, space-hardened chips for orbital satellites, and high-bandwidth memory. You'll control removal rates, dishing, erosion, and defectivity while managing pattern density effects and multi-material selectivity across diverse topographies and materials.

You should have deep expertise in CMP, but be ready to work across core process domains such as deposition, wet clean, and metrology as integration evolves. This is a highly hands-on role at one of the most ambitious fab programs in the world.

• Develop and qualify CMP processes for STI, ILD, metal layers (W, Cu, Co, Ru), and barrier films across all interconnect levels for two concurrent product flows
• Optimize removal rates, within-wafer uniformity, planarization efficiency, and surface finish through systematic DOE and first-principles analysis of pad, slurry, and conditioning interactions
• Own post-CMP clean process qualification including brush scrub and chemical clean steps
• Qualify CMP tools from installation through production readiness, including pad conditioning, slurry delivery, and endpoint detection
• Analyze processes from a first-principles, physics-based approach to understand and manipulate mechanisms, not just recipes
• Lead root cause analysis, establish inline metrology and SPC control strategies, and drive systematic yield improvement
• Support 24/7 manufacturing operations through rotations, on-call availability, and rapid response to critical production issues
• Drive next-generation CMP slurry formulations and process development

• Degree in Chemical Engineering, Materials Science, Electrical Engineering, Mechanical Engineering, or related technical field, or equivalent experience
• 5+ years of hands-on CMP process engineering experience in a semiconductor fab, especially <7nm in a logic, memory, or foundry environment
• Deep experience with CMP tool qualification (Applied Materials, Ebara, or equivalent), slurry and pad optimization, and process of record (POR) establishment at advanced nodes
• Proficiency with CMP metrology tools: film thickness measurement, defect inspection, surface roughness measurement (AFM), and dishing/erosion characterization
• Strong DOE skills and statistical analysis capability (JMP, Python, or R)
• Ability to work closely and proactively across lithography, etch, thin films, integration, and equipment engineering teams

Along with competitive pay, as a full-time Tesla employee, you are eligible for the following benefits at day 1 of hire:

• Medical plans > plan options with $0 payroll deduction
• Family-building, fertility, adoption and surrogacy benefits
• Dental (including orthodontic coverage) and vision plans, both have options with a $0 paycheck contribution
• Company Paid (Health Savings Accounts) HSA Contribution when enrolled in the High-Deductible medical plan with HSA
• Healthcare and Dependent Care Flexible Spending Accounts (FSA)
• 401(k) with employer match, Employee Stock Purchase Plans, and other financial benefits
• Company paid Basic Life, AD&D
• Short-term and long-term disability insurance (90 day waiting period)
• Employee Assistance Program
• Sick and Vacation time (Flex time for salary positions, Accrued hours for Hourly positions), and Paid Holidays
• Back-up childcare and parenting support resources
• Voluntary benefits to include: critical illness, hospital indemnity, accident insurance, theft & legal services, and pet insurance
• Weight Loss and Tobacco Cessation Programs
• Tesla Babies program
• Commuter benefits
• Employee discounts and perks program